各种电机控制方式介绍 (2)ppt课件.ppt
《各种电机控制方式介绍 (2)ppt课件.ppt》由会员分享,可在线阅读,更多相关《各种电机控制方式介绍 (2)ppt课件.ppt(54页珍藏版)》请在文库网上搜索。
1、各种半导体LED湿法清洗机 苏州晶洲装备科技施利君 DF PE 1 Batch type: Conventional type Cassette type Cassette less type Single bath type Single wafer type: Scrubber SEZ Wet bench type 2 Wet bench bath configuration SC1DIHFDISC2DIDIDRY Pre Furnace Clean SC1: Standard Clean 1 SC2: Standard Clean 2 HF: Hydrofluoric Acid DI:
2、De Ionized Water Lot Flow 3 Typical Wet Clean Bath P Heat Exchanger filterpump Process bath Measurement tank 4 1.Particle pattern defect 2.Metal contamination Junction leak 3.Organic contamination gate oxide leak 4.Native oxide gate oxide leak 5.Micro Roughnesss gate oxide leak The contamination and
3、 Its influence(沾污及其影响) 5 SC: standard clean, RCA: A company name, DIW: de ionized water SC-1 (RCA1/APM: NH4OH: H2O2: DIW), SC-2 (RCA2/HPM: HCl: H2O2: DIW), CARO (SPM/Piranha: H2SO4: H2O2) H3PO4(H3PO4: DIW) BOE (Buffer oxide etch HF: NH4F) with surfactant(表面活性剂) DHF (Dilute HF) Dry System (Spin Dry/I
4、PA Vapor Dry/Marangoni Dry) Key word 6 SC1(MS) light organic & particle remove DHF Remove chemical oxide or native OX SC2 Removal of metals impurities BOE: Remove oxide with PR HF/HNO3 Remove poly film. SPM(H2SO4:H2O2) Photo resist and metals ions H3PO4 Nitride remove 49%HF remove nitride and thick
5、oxide Chemical application 7 SC1 8 Typical Ratio : NH4OH : H2O2 : DI = 1:1:5-1:2:50 Temp : 40 80 C Mechanism: Solution oxidize surface organics and dissolves soluble complexes formed. PH is high Low stability of metal impurities NH4OH Dissolves SiO2 and etches Si H2O2 Oxidizer, forms layer of chemic
6、al oxide Deposition of some species of metals on oxide (e.g. Fe, Ca) 9 10 Relationship of Zeta Potentials and pH Value 11 SC2 12 Typical ratio: Hcl: H2O2:DI = 1:1:5 1:1:50 Temp : Typical 80c Purpose: Remove metallic impurities from wafers Mechanism(机制): Low PH improves solubility of metallic impurit
- 1.请仔细阅读文档,确保文档完整性,对于不预览、不比对内容而直接下载带来的问题本站不予受理。
- 2.下载的文档,不会出现我们的网址水印。
- 3、该文档所得收入(下载+内容+预览)归上传者、原创作者;如果您是本文档原作者,请点此认领!既往收益都归您。
下载文档到电脑,查找使用更方便
10 文币 0人已下载
下载 | 加入VIP,免费下载 |
- 配套讲稿:
如PPT文件的首页显示word图标,表示该PPT已包含配套word讲稿。双击word图标可打开word文档。
- 特殊限制:
部分文档作品中含有的国旗、国徽等图片,仅作为作品整体效果示例展示,禁止商用。设计者仅对作品中独创性部分享有著作权。
- 关 键 词:
- 各种电机控制方式介绍 2ppt课件 各种 电机 控制 方式 介绍 ppt 课件